Plasma etching method, control program and computer storage medium

ABSTRACT

A plasma etching method, for plasma-etching a target substrate including at least a film to be etched, an organic film to become a mask of the to-be-etched film, and a Si-containing film which are stacked in order from bottom, includes the first organic film etching step, the treatment step and the second organic film etching step when the organic film is etched to form a mask pattern of the to-be-etched film. In the first organic film etching step, a portion of the organic film is etched. In the treatment step, the Si-containing film and the organic film are exposed to plasma of a rare gas after the first organic film etching step. In the second organic film etching step, the remaining portion of the organic film is etched after the treatment step.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No. 12/497,106filed Jul. 2, 2009, which claims priority to Japanese Patent ApplicationNo. 2008-175391 filed on Jul. 04, 2008, the entire contents of both ofwhich are hereby incorporated by reference. U.S. application Ser. No.12/497,106 is a non-provisional of U.S. Provisional Application Ser. No.61/092,628 filed Aug. 28, 2008.

FIELD OF THE INVENTION

The present invention relates to a plasma etching method of etching asubject substrate using plasma, a control program for executing theplasma etching method and a computer storage medium storing the controlprogram.

BACKGROUND OF THE INVENTION

In a semiconductor manufacturing process, conventionally, a siliconoxide film or the like is formed to have a desired pattern by performingplasma etching via a mask layer. With miniaturization of circuits insemiconductor devices, such plasma etching requires finer processes withhigh precision.

As one of techniques for performing such finer processes with highprecision, there is a technique which uses a hard mask such as amorphouscarbon or SOH (Spin On Hardmask) as a mask when contact holes are formedby plasma etching. It is known that a film containing carbon (C) of suchamorphous carbon or SOH is etched by O₂-based plasma and a mixture gasof CO and O₂ is, for example, used as an etching gas (see, e.g.,Japanese Patent Application Publication No. 2007-294943 andcorresponding U.S. Patent Application Publication No. 2007-284335A).

However, as mentioned above, when the amorphous carbon is etched byplasma using the mixture gas of CO and O₂ as the etching gas, forexample, a diameter of a contact hole decreases due to miniaturizationof an etching pattern, a so-called bowing effect that a shape of a sidewall of the hole is curved outwardly is likely to occur. In addition,when a silicon oxide film is plasma-etched by using amorphous carbon orthe like having bowing as a mask, there arises a problem that an erroroccurs in a shape of hole in the silicon oxide film. In addition, when ahole such as a contact hole or the like is formed, such bowing becomesnoticeable as a diameter of the hole becomes smaller than 0.8 μm.

SUMMARY OF THE INVENTION

In view of the above, the present invention provides a plasma etchingmethod which is capable of effectively preventing bowing from occurring,as compared to conventional techniques, and performing finer processeswith high precision, a control program for executing the plasma etchingmethod and a computer storage medium storing the control program.

In accordance with a first aspect of the present invention, there isprovided a plasma etching method of plasma-etching a subject substrateincluding at least a film to be etched, an organic film to become a maskof the to-be-etched film, and a Si-containing film which are stacked inorder from bottom, including at least: when the organic film is etchedto form a mask pattern of the to-be-etched film, a first organic filmetching step of etching a portion of the organic film; a treatment stepof exposing the Si-containing film and the organic film to plasma of arare gas after the first organic film etching step; and a second organicfilm etching step of etching the remaining portion of the organic filmafter the treatment step.

In accordance with a second aspect of the present invention, there isprovided a control program which operates on a computer and, whenexecuted, controls a plasma etching apparatus to perform a plasmaetching method.

In accordance with a third aspect of the present invention, there isprovided a computer storage medium in which a control program operatingon a computer is stored, wherein, when executed, the control programcontrols a plasma etching apparatus to perform a plasma etching method.

BRIEF DESCRIPTION OF THE DRAWINGS

The objects and features of the present invention will become apparentfrom the following description of embodiments, given in conjunction withthe accompanying drawings, in which:

FIG. 1 is a view showing a configuration of a plasma etching apparatusin accordance with one embodiment of the present invention;

FIGS. 2A to 2E are views showing processes of a plasma etching method inaccordance with one embodiment of the present invention;

FIGS. 3A to 3B are views for explaining a bowing prevention mechanism inaccordance with one embodiment of the present invention;

FIGS. 4A to 4B are schematic views showing etching shapes in oneembodiment of the present invention and a comparative example;

FIGS. 5A to 5C are schematic views showing an examination result of arelation between RF power for bias of a treatment process and an etchingshape;

FIG. 6 is a graph showing a relation between RF power for bias of atreatment process and a bowing CD;

FIGS. 7A to 7C are views showing an examination result of a relationbetween upper electrode application RF power of a treatment process andan etching shape; and

FIGS. 8A to 8C are schematic views showing an examination result of aneffect of the presence or not of a first organic film etching process onan etching shape.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Hereinafter, an embodiment of the present invention will be describedwith reference to the accompanying drawings which form a part hereof.FIG. 1 shows a configuration of a plasma etching apparatus in accordancewith the embodiment of the present invention.

A plasma etching apparatus 1 is configured as a capacitively coupledparallel plate type etching apparatus in which an upper and a lowerelectrode plate are disposed opposite to each other in parallel andplasma-generating power supplies are respectively connected to both ofthe electrode plates.

The plasma etching apparatus 1 includes a grounded cylindrical processchamber (process container) 2 made of, e.g., aluminum whose suface isanodited. A columnar susceptor support 4, for mounting thereon a targetsubstrate, e.g., a semiconductor wafer W, is provided on the bottom ofthe process chamber 2 via an insulating plate 3 made of ceramic or thelike. In addition, a susceptor 5 serving as a lower electrode isdisposed on the susceptor support 4. A high pass filter (HPF) 6 isconnected to the susceptor 5.

A coolant path 7 is provided within the susceptor support 4. A coolantis introduced and circulated in the coolant path 7 through a coolantintroduction pipe 8 and is discharged through a coolant discharge pipe9. The cold heat of the coolant is transferred to the semiconductorwafer W, so that the semiconductor wafer W is controlled to a desiredtemperature.

An upper central portion of the susceptor 5 is protruded in a disc shapeand an electrostatic chuck 11 having the substantial same shape as thesemiconductor wafer W is disposed on the upper central portion. Theelectrostatic chuck 11 is configured by arranging an electrode 12 withinan insulating material. The electrostatic chuck 11 electrostaticallyattracts and holds the semiconductor wafer W by, for example, a Coulombforce generated by applying a DC voltage of, e.g., 1.5 kV from a DCpower supply 13, which is connected to the electrode 12, to theelectrostatic chuck 11.

A gas passage 14 for supplying a heat transfer medium (e.g., He gas orthe like) to a back surface of the semiconductor wafer W is provided inthe insulating plate 3, the susceptor support 4, the susceptor 5 and theelectrostatic chuck 11, and the cold heat of the susceptor 5 istransferred to the semiconductor wafer W through the heat transfermedium so that the semiconductor wafer W is maintained at a desiredtemperature.

An annular focus ring 15 is disposed on the upper peripheral edgeportion of the susceptor 5 to surround the semiconductor wafer W mountedon the electrostatic chuck 11. The focus ring 15 serves to improveetching uniformity.

An upper electrode 21 is disposed above the susceptor 5 in parallel toand opposite to the susceptor 5. The upper electrode 21 is held by theupper portion of the process chamber 2 via an insulating material 22.The upper electrode 21 includes an electrode plate 24 and a conductiveelectrode support 25 for holding the electrode plate 24. The electrodeplate 24 is made of, e.g., a conductor or a semiconductor and includes aplurality of injection holes 23. The electrode plate 24 has a surfaceopposite to the susceptor 5.

A gas inlet 26 is provided in the center of the electrode support 25 inthe upper electrode 21 and a gas supply pipe 27 is connected to the gasinlet 26. In addition, a processing gas supply source 30 is connected tothe gas supply pipe 27 via a valve 28 and a mass flow controller 29. Anetching gas for plasma etching process and a rare gas for treatment aresupplied from the processing gas supply source 30.

A gas exhaust pipe 31 is connected to the bottom of the process chamber2 and a gas exhaust unit 35 is connected to the exhaust pipe 31. The gasexhaust unit 35 includes a vacuum pump such as a turbo molecule pump andis configured to exhaust the inside of the process chamber 2 to apressurized atmosphere, for example, a pressure of 1 Pa or less. Inaddition, a gate valve 32 is provided in a side wall of the processchamber 2 and the semiconductor wafer W is transferred into an adjacentload lock chamber (not shown) which the gate valve 32 is opened.

A first radio frequency (RF) power supply 40 is connected to the upperelectrode 21 and a matching unit 41 is provided on a power feed lineextending between the first RF power supply 40 and the upper electrode21. In addition, a low pass filter (LPF) 42 is connected to the upperelectrode 21. The first RF power supply 40 has a frequency ranging from50 to 150 MHz (60 MHz in this embodiment). A high-density plasma in adesirable dissociated state can be generated by applying RF power ofsuch a high frequency to the upper electrode 21.

A second RF power supply 50 is connected to the susceptor 5 serving asthe lower electrode and a matching unit 51 is provided on a power feedline extending between the second RF power supply 50. The second RFpower supply 50 has a frequency range lower than that of the first RFpower supply 40 and a proper ion action can be made to the semiconductorwafer W as the subject substrate without doing damage to thesemiconductor wafer W by applying RF power of such a frequency range tothe susceptor 5. That is, the second RF power supply 50 is for applyingRF power for bias. A frequency of the second RF power supply 50 ispreferably 1 to 20 MHz (2 MHz in this embodiment).

Operation of the above-configured plasma etching apparatus 1 isgenerally controlled by a control unit 60. The control unit 60 includesa process controller 61 having a CPU for controlling components of theplasma etching apparatus 1, a user interface 62 and a storage unit 63.

The user interface 62 includes a keyboard to allow a process manager toinput commands for managing the plasma etching apparatus 1, a displayfor displaying operation situations of the plasma etching apparatus 1,and the like.

In the storage unit 63 stores recipes including control programs(software) for controlling various processes performed in the plasmaetching apparatus 1 under the control of the process controller 61,process condition data, and the like. If necessary, the processcontroller 61 executes a recipe read from the storage unit 63 inresponse to instructions from the user interface 62, thereby performinga desired process in the plasma etching apparatus under the control ofthe process controller 61. In addition, the recipes of the controlprogram, the process condition data, etc., can be stored in acomputer-readable storage medium (for example, a hard disk, CD, flexibledisk, semiconductor memory or the like.), or transmitted on-line fromother devices through, e.g., a dedicated line when necessary.

When the above-configured plasma etching apparatus 1 performs plasmaetching for the semiconductor wafer W, the semiconductor wafer W isfirst transferred from the load lock chamber (not shown) into theprocess chamber 2 with the gate valve 32 opened and then is loaded onthe electrostatic chuck 11. Then, by applying a DC voltage from the DCpower supply 13 to the electrostatic chuck 11, the semiconductor wafer Wis electrostatically attracted and held on the electrostatic chuck 11.Then, the gate valve 32 is closed and the inside of the process chamber2 is exhausted to a predetermined degree of vacuum by the gas exhaustingunit 35.

Thereafter, the valve 28 is opened and a predetermined etching gas and arare gas for treatment are introduced from the processing gas supplysource 30 into a hollow of the upper electrode 21 through the processgas supply pipe 27 and the gas inlet 26, with their flow rate controlledby the mass flow controller 29, and are uniformly discharged toward thesemiconductor wafer W through the injection holes 23 of the electrodeplate 24, as indicated by arrows in FIG. 1.

Then, the inside of the process chamber 2 is maintained at apredetermined pressure. Thereafter, RF power of a predeterminedfrequency is applied from the first RF power supply 40 to the upperelectrode 21. Accordingly, an RF electric field is produced between theupper electrode and the susceptor 5 as the lower electrode and theetching gas is dissociated and plasmarized.

On the other hand, RF power of a frequency lower than that of the firstRF power supply 40 is applied from the second RF power supply 50 to thesusceptor 5 as the lower electrode. Accordingly, ions in plasma areattracted toward the susceptor 5 and etching anisotropy is increased byion assist.

When a predetermined plasma etching process is completed, the supply ofRF power and the supply of process gas are stopped and the semiconductorwafer W is carried out of the process chamber 2 in an order reverse tothe above-described order.

FIGS. 2A to 2E schematically show enlarged main portions of thesemiconductor wafer as the target substrate in this embodiment. As shownin FIG. 2A, the semiconductor wafer W has a structure including at leasta silicon oxide film 101 as a film to be etched, an amorphous carbonfilm 102 as an organic film to become a mask of the silicon oxide film101, and a SiON film 103 as a Si-containing film, which are stacked inorder from bottom. A photoresist film 104 patterned in a predeterminedshape is formed on the SiON film 103. The amorphous carbon film 102 hasa thickness of, e.g., several hundred nanometers and the SiON film 103has a thickness of, e.g., several tens nanometers.

The SiON film 103 acts as a portion of a bottom antireflective coating(BARC) when the photoresist film 104 is exposed, and, in actuality, anorganic BARC film exists between the SiON film 103 and the photoresistfilm 104. Instead of the SiON film, for example, a SiC film, a SiN film,etc. may be used.

In this embodiment, from a state shown in FIG. 2A, the SiON film 103 isfirst plasma-etched to be in a state shown in FIG. 2B by using thephotoresist film 104 as a mask. This plasma etching is performed using,for example, a fluorine-based gas such as CF₄ or the like.

Next, a process to form a mask for etching the silicon oxide film 101 byetching the amorphous carbon film 102 as the organic film is performed.In this process, a first organic film etching process to plasma-etch aportion of the organic amorphous carbon film 102 is first performed asshown in FIG. 2C. This plasma etching is performed using, for example,an oxygen-based gas (for example, a mixture of CO and O₂) as an etchinggas. In this first organic film etching process, the photoresist film104 is almost etched away, thereby exposing a surface of the SiON film103.

Next, a treatment process to expose the SiON film 103 as a Si-containingfilm and the organic amorphous carbon film 102 to plasma of the rare gasis performed as shown in FIG. 2D. As the plasma of the rare gas, plasmaof Ar gas is preferably used but plasma of other rare gases, forexample, Xe gas, Kr gas, etc. may be also used. Here, “plasma of raregas” basically refers to plasma of a single rare gas or a mixture ofrare gases. However, a very small quantity (for example, less than orequal to 5% by flow rate) of additive gas other than the rare gas may becontained as long as the species and amount of the additive gas is suchthat the amorphous carbon film 102 and the SiON film 103 are notsubstantially etched.

Next, a second organic film etching process to plasma-etch the remainingportion of the organic amorphous carbon film 102 is performed as shownin FIG. 2E. This plasma etching is performed by using the same etchinggas as that in the first organic film etching process, for example, anoxygen-based etching gas (for example, a mixture of CO and O₂). Throughthe above-described three processes, a hard mask of the amorphous carbonfilm 102 is formed. Thereafter, the silicon oxide film 101 isplasma-etched to form contact holes and the like by using the amorphouscarbon film 102 as a mask.

As described above, this embodiment performs three processes: the firstorganic film etching process to plasma-etch a portion of the amorphouscarbon film 102, the treatment process to expose the amorphous carbonfilm 102 and the SiON film 103 to plasma of a rare gas, and the secondorganic film etching process to plasma-etch the remaining portion of theamorphous carbon film 102, instead of plasma-etching the organicamorphous carbon film 102 with a single process. This can prevent bowingin a side wall of the amorphous carbon film 102.

It is guessed that the prevention of bowing in this embodiment isgrounded on the following reasons. That is, as shown in FIG. 3A, thereason why bowing occurs in the side wall of the amorphous carbon film102 is that oxygen radical near an entrance of a hole 110 acts on a sidewall of the hole 110 to etch away the side wall while etching isprogressing toward the bottom of the hole 110. In the meantime, when thetreatment process to expose the amorphous carbon film 102 and the SiONfilm 103 to the plasma of the rare gas is performed, as shown in FIG.3B, a SiC protection film is formed on the side wall in the hole 110 ofthe amorphous carbon film 102 by Si generated from the Si-containingSiON film 103 and C generated from the organic amorphous carbon film 102by action of the plasma of the rare gas. This SiC protection film actsto prevent bowing from occurring.

As an example, using the plasma etching apparatus 1 shown in FIG. 1, thesemiconductor wafer W (30 cm in diameter) having the structure shown inFIG. 2A (60 nm of aperture diameter (top CD) of the photoresist film104) was subjected to plasma etching by the following recipes.

The process controller 61 executes process recipes of respectiveexamples, which will be described later, read from the storage unit 63of the control unit 60. The process controller 61 controls components ofthe plasma etching apparatus 1 based on the control program, so that aplasma etching process is performed according to the read processrecipes.

(SiON film etching process)

Etching gas: CF₄=150 sccm

Pressure: 6.67 Pa (50 mTorr)

Power (upper/lower): 300/300 W

Time: one minute and 17 seconds

(First organic film etching process)

Etching gas: CO/O₂=150/300 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/1000 W

Time: 10 seconds

(Treatment process)

Treatment gas: Ar=750 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/1000 W

Time: 15 seconds

(Second organic film etching process)

Etching gas: CO/O₂=150/300 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/1000 W

Time: one minute and 20 seconds

As a comparative example, plasma etching was performed according to thefollowing recipe which does not have the above-mentioned treatmentprocess.

(SiON film etching process)

Etching gas: CF₄=150 sccm

Pressure: 6.67 Pa (50 mTorr)

Power (upper/lower): 300/300 W

Time: one minute and 17 seconds

(Organic film etching process)

Etching gas: CO/O₂=150/300 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/1000 W

Time: one minute and 30 seconds

In the comparative example, as shown in FIG. 4A, large bowing occurredin the side wall of the hole 110 of the amorphous carbon film 102. Inthis case, the remaining amount of mask (thickness of the SiON film 103after the etching) was 62 nm, bowing CD (diameter of a portion havingthe largest diameter) was 63 nm, and bottom CD (diameter of the holebottom) was 24 nm.

On the other hand, in the above example of the invention, as shown inFIG. 4B, bowing could be suppressed from occurring in the side wall ofthe hole 110 of the amorphous carbon film 102, as compared to thecomparative example. In this case, the remaining amount of mask(thickness of the SiON film 103 after the etching) was 44 nm, bowing CD(diameter of a portion having the largest diameter) was 43 nm, andbottom CD (diameter of the hole bottom) was 25 nm.

By the way, if Ar is used as a rare gas as in the above, some extent ofRF power for bias (RF power applied to the susceptor (lower electrode) 5shown in FIG. 1) is preferably supplied in the treatment process. FIG. 5shows an examination result of a relation between a value of RF powerfor bias in the treatment process and the amount of occurred bowing. Inthis case, except for the value of RF power for bias in the treatmentprocess, a plasma etching process was performed under the sameconditions as shown below.

(SiON film etching process)

Etching gas: CF₄=150 sccm

Pressure: 6.67 Pa (50 mTorr)

Power (upper/lower): 300/300 W

Time: one minute and 17 seconds

(First organic film etching process)

Etching gas: CO/O₂=150/300 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/1000 W

Time: 10 seconds

(Treatment process)

Treatment gas: Ar=750 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/(0, 200, 1000) W

Time: 15 seconds

(Second organic film etching process)

Etching gas: CO/O₂=150/300 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/1000 W

Time: one minute and 20 seconds

FIGS. 5A, 5B and 5C show that the RF power for bias in the treatmentprocess is 0 W, 200 W and 1000 W, respectively. As shown in thesefigures, the amount of bowing tends to increase as a value of RF powerfor bias decreases.

FIG. 6 shows a relation between a bowing CD (diameter of a portionhaving the largest diameter) (nm), which is represented by a verticalaxis, and RF power (W) for bias in the treatment process, which isrepresented by a horizontal axis. As shown in FIG. 6, when the value ofRF power for bias in the treatment process is increased, the bowing CDwas observed to have a tendency to be linearly decreased. It is guessedthat this is because formation of a SiC protection film by Ar plasma ispromoted when the RF power for bias in the treatment process isincreased. On this account, the RF power for bias to be applied in thetreatment process is preferably 100 W or greater, more preferably 500 Wor greater. In this case, since the semiconductor wafer used has thediameter of 30 cm, the RF power to be applied is preferably 0.14 W/cm²or greater, more preferably 0.7 W/cm² or greater when indicated by powerper unit area. The above result was derived when Ar gas is used as arare gas. If a heavier rare gas, for example, Xe gas, Kr gas or thelike, is used, it is considered that some extent of effects is exhibitedeven under no application of RF power for bias in the treatment process.

FIGS. 7A to 7C show an examination result of a relation between a valueof RF power applied to an upper electrode (the upper electrode 21 shownin FIG. 1) in the treatment process and the amount of bowing. In thiscase, except for the value of RF power applied to the upper electrode inthe treatment process, the plasma etching process was performed underthe same conditions as shown below.

(SiON film etching process)

Etching gas: CF₄=150 sccm

Pressure: 6.67 Pa (50 mTorr)

Power (upper/lower): 300/300 W

Time: one minute and 17 seconds

(First organic film etching process)

Etching gas: CO/O₂=150/300 sccm

Pressure: 6.67 Pa (50 mTorr)

Power (upper/lower): 2000/1000 W

Time: 10 seconds

(Treatment process)

Treatment gas: Ar=750 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): (2000, 1000, 800)/1000 W

Time: 15 seconds

(Second organic film etching process)

Etching gas: CO/O₂=150/300 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/1000 W

Time: one minute and 30 seconds

FIGS. 7A, 7B and 7C show that the RF power applied to the upperelectrode is 2000 W, 1000 W and 800 W, respectively. As shown in thesefigures, the magnitude of the RF power applied to the upper electrode inthe treatment process has little effect on the amount of occurredbowing.

FIGS. 8B and 8C show examination results of etching shapes when thetreatment process shown in FIG. 2D is performed, without the firstorganic film etching process shown in FIG. 2C, and then an organic filmetching process is performed. FIG. 8A shows the case where the firstorganic film etching process was performed for comparison. A plasmaetching process was performed according to the following recipe.

(SiON film etching process)

Etching gas: CF₄=150 sccm

Pressure: 6.67 Pa (50 mTorr)

Power (upper/lower): 300/300 W

Time: one minute and 17 seconds

(First organic film etching process)

Etching gas: CO/O₂=150/300 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/1000 W

Time: 10 seconds

(Treatment process)

Treatment gas: Ar=750 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/1000 W

Time: 15 seconds

(Second organic film etching process)

Etching gas: CO/O₂=150/300 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/1000 W

Time: one minute and 20 seconds

FIGS. 8B and 8C show the cases where the first organic film etchingprocess was not performed. A plasma etching process was performedaccording to the following recipe. FIG. 8B is different from FIG. 8Conly in that RF power for bias in the treatment process in FIG. 8B is1000 W while RF power for bias in the treatment process in FIG. 8C is500 W.

(SiON film etching process)

Etching gas: CF₄=150 sccm

Pressure: 6.67 Pa (50 mTorr)

Power (upper/lower): 300/300 W

Time: one minute and 17 seconds

(Treatment process)

Treatment gas: Ar=750 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/(1000, 500) W

Time: 15 seconds

(Organic film etching process)

Etching gas: CO/O₂=150/300 sccm

Pressure: 2.67 Pa (20 mTorr)

Power (upper/lower): 2000/1000 W

Time: one minute and 30 seconds

As shown in FIGS. 8B and 8C, when the treatment process was performedwithout performing the first organic film etching process, the amorphouscarbon film 102 was etch-stopped halfway without being etched throughoutin the organic film etching process.

Accordingly, it can be known that the first organic film etching processprior to the treatment process is indispensable. In addition, as can beseen from the bowing prevention mechanism shown in FIG. 3B, in order toform a protection film wholly on a side wall portion in which bowing islikely to occur (for example, upper 5 to 20 ⁹ 6 with respect to depth ofthe entire hole), the first organic film etching process is preferablyperformed until the side wall portion is exposed.

As described above, according to the above-described embodiment, thereis provided a plasma etching method which is capable of effectivelypreventing bowing from occurring as compared to conventional techniquesand performing finer processes with high precision. The presentinvention is not limited to the disclosed embodiment but may be modifiedin various ways. For example, the plasma etching apparatus is notlimited to the parallel plate type in which RF powers are applied to theupper and the lower electrode as shown in FIG. 1 but any of other typesof plasma etching apparatus may be used.

While the invention has been shown and described with respect to theembodiments, it will be understood by those skilled in the art thatvarious changes and modification may be made without departing from thescope of the invention as defined in the following claims.

1. A plasma etching method of plasma-etching a target substrateincluding at least a target film to be etched, an organic film, aSi-containing film, and a photoresist film patterned on theSi-containing film which are stacked in that order from bottom, themethod comprising: a Si-containing film etching step of etching theSi-containing film by using the photoresist film as a first mask suchthat openings of the Si-containing film are formed; a first organic filmetching step of etching a portion of the organic film thereby formingholes each having a first depth in the portion of the organic film; atreatment step of exposing, after the first organic film etching step,the Si-containing film and the organic film to a plasma of a rare gassuch that a Si-containing protection film is formed on sidewalls of theholes where bowing is likely to occur; a second organic film etchingstep of etching, after the treatment step, the remaining portion of theorganic film exposed through the openings to thereby produce holes eachhaving a second depth; and a target film etching step of etching thetarget film by using the organic film as a second mask.
 2. The plasmaetching method of claim 1, wherein the first depth is 5 to 20% of thesum of the first and the second depth.
 3. The plasma etching method ofclaim 1, wherein the treatment step includes applying RF power for biasto the target substrate while generating the plasma of the rare gas byusing RF power for plasma, a frequency range of the RF power for biasbeing lower than that of the RF power for plasma.
 4. The plasma etchingmethod of claim 1, wherein the rare gas includes at least one of Ar gas,Xe gas and Kr gas.
 5. The plasma etching method of claim 1, wherein RFpower for bias is applied to the target substrate in the treatment step.6. The plasma etching method of claim 1, wherein the organic film is anamorphous carbon film.
 7. The plasma etching method of claim 1, whereinthe Si-containing film is one of a SiON film, a SiC film and a SiN film.8. The plasma etching method of claim 1, wherein, in the treatment step,the Si-containing film and the organic film are exposed to a plasma ofan additive gas provided with the plasma of the rare gas, and wherein aflow rate of the additive gas is less than or equal to about 5% of atotal flow rate of the additive gas and the rare gas.
 9. A plasmaetching method for plasma-etching a target substrate including at leasta target film to be etched, an organic film, a Si-containing film, and aphotoresist film patterned on the Si-containing film which are stackedin that order from bottom, the method comprising: a Si-containing filmetching step of etching the Si-containing film by using the photoresistfilm as a first mask such that openings of the Si-containing film areformed; a first organic film etching step of etching a portion of theorganic film thereby forming holes each having a first depth in theportion of the organic film; a treatment step of exposing, after thefirst organic film etching step, the Si-containing film and the organicfilm to a plasma of a rare gas such that a Si-containing protection filmis formed on sidewalls of the holes where bowing is likely to occur; asecond organic film etching step of etching, after the treatment step,the remaining portion of the organic film exposed through the openingsto thereby produce holes each having a second depth; and a target filmetching step of etching the target film by using the organic film as asecond mask, wherein the Si-containing protection film contains siliconcarbide.
 10. The plasma etching method of claim 9, wherein the firstdepth is 5 to 20% of the sum of the first and the second depth.
 11. Theplasma etching method of claim 9, wherein the treatment step includesapplying RF power for bias to the target substrate while generating theplasma of the rare gas by using RF power for plasma, a frequency rangeof the RF power for bias being lower than that of the RF power forplasma.
 12. The plasma etching method of claim 9, wherein the rare gasincludes at least one of Ar gas, Xe gas and Kr gas.
 13. The plasmaetching method of claim 9, wherein RF power for bias is applied to thetarget substrate in the treatment step.
 14. The plasma etching method ofclaim 9, wherein the organic film is an amorphous carbon film.
 15. Theplasma etching method of claim 9, wherein the Si-containing film is oneof a SiON film, a SiC film and a SiN film.
 16. The plasma etching methodof claim 9, wherein, in the treatment step, the Si-containing film andthe organic film are exposed to a plasma of an additive gas providedwith the plasma of the rare gas, and wherein a flow rate of the additivegas is less than or equal to about 5% of the sum of the flow rates ofthe additive gas and the rare gas.
 17. A plasma etching apparatus forplasma-etching a target substrate including at least a target film to beetched, an organic film, a Si-containing film, and a photoresist filmpatterned on the Si-containing film which are stacked in that order frombottom, the apparatus comprising: a chamber configured to accommodatetherein the target substrate; a susceptor configured to mount thereonthe target substrate within the chamber; a gas inlet configured tointroduce a processing gas into the chamber; a plasma generating unitconfigured to generate a plasma of the processing gas in the chamber; agas exhaust pipe connected to a gas exhaust unit for exhausting aninside of the chamber; a control unit configured to control a plasmaetching method to be performed on the target substrate, the plasmaetching method including: a Si-containing film etching step of etchingthe Si-containing film by using the photoresist film as a first masksuch that openings of the Si-containing film are formed; a first organicfilm etching step of etching a portion of the organic film therebyforming holes in the portion of the organic film; a treatment step ofexposing, after the first organic film etching step, the Si-containingfilm and the organic film to a plasma of a rare gas such that aSi-containing protection film is formed on sidewalls of the holes; asecond organic film etching step of etching, after the treatment step,the remaining portion of the organic film exposed through the openings;and a target film etching step of etching the target film by using theorganic film as a second mask.
 18. The plasma etching apparatus of claim17, wherein the Si-containing protection film contains silicon carbide.